HO-SE-01 Variable Angle Spectroscopic Ellipsometer

Variable Angle Spectroscopic Ellipsometer Spectroscopic Ellipsometer is widely used for thin film analysis and measurements. Holmarc’s spectroscopic ellipsometer incorporates Rotating Analyzer Ellipsometry technology to characterize thin film samples. It uses a high speed CCD array detection to collect the entire spectrum. It measures films from nanometer thickness up to tens of microns and the optical properties from transparent to absorbing materials. It accurately measures optical constants like refractive index, film thickness and extinction coefficient. Our standard system comes with Quartz-Halogen lamp for visible through IR range. Our spectroscopic ellipsometer software allows the user to measure and analyze multilayer thin films and complex thin film structures. An autocollimator, Z stage and tilt platforms are provided for sample alignment. XY motorized stage and motorized rotation stages are provided as unoptional feature for mapping thin film uniformity. Specifications: Spectral range     450 - 800 nm     Ellipsometer configuration     RAE     Detector     3648 pixel CCD linear sensor     Spectral resolution     1 nm     Incident angle     50 - 75 degree (Resolution 0.1 degree, Automated operation)     Sample focusing     Automated     Sample thickness     0.3 mm - 8 mm     Thickness measurement range     20 nm - 10 microns     Resolution of film thickness     0.01 nm     Resolution of measured R.I     0.001     Sample alignment     Manual tilt     Sample measurement     Automatic     Thickness analysis     Advanced mathematical fitting algorithms Features: Non-destructive and non-contact technique     Analysis of single and multilayer samples     Accurate measurements of ultra-thin films     Software for measurement, modeling and automatic operations     All range of (Ψ, Δ) can be measured     Uniform sensitivity for (Ψ, Δ) Software Features:     Automatic operation     Automatic sample focusing     User extendable materials library     Data can be saved as Excel     Mathematical fitting algorithm     Multilayer thickness measurement     Deduction of thickness and optical constants Drawings: Fig. Optical Layout of Variable Angle Spectroscopic Ellipsometer